====== Fe (5000) into Layer 1                   =======
        SRIM-2013.00
==================================================
      ION and final RECOIL ATOM Distributions     
 See  SRIM Outputs\TDATA.txt for calculation details
==================================================
--------------------------------------------------------------------
    Recoil/Damage Calculations made with Kinchin-Pease Estimates    
--------------------------------------------------------------------
----------------------------------------------------------------
  There are NO RECOILS unless a full TRIM calculation is made.   
----------------------------------------------------------------
See file :  SRIM Outputs\TDATA.txt   for details of calculation
 Ion    = Fe   Energy = 5000  keV
============= TARGET MATERIAL ======================================
Layer  1 : Layer 1
Layer Width =     5.E+04 A   Layer # 1- Density = 3.668E22 atoms/cm3 = 4.81 g/cm3
  Layer # 1- Se = 100  Atomic Percent = 100  Mass Percent
====================================================================
 Total Ions calculated =1000.00
 Ion Average Range =   279.4E+02 A   Straggling =   526.3E+01 A
 Ion Lateral Range =   537.5E+01 A   Straggling =   668.1E+01 A
 Ion Radial  Range =   835.4E+01 A   Straggling =   419.9E+01 A
====================================================================
 Range Skewne- = -001.0610  &= [-(X-Rp)^3]/[N*Straggle^3]
 Range Kurtosis = 004.9396  &= [-(X-Rp)^4]/[N*Straggle^4]
 Statistical definitions above are those used in VLSI implant modelling.
====================================================================
=================================================================
  Table Distribution Units are >>>  (Atoms/cm3) / (Atoms/cm2)  <<<  
=================================================================
   DEPTH         Fe       Recoil     
   (Ang.)       Ions     Distribution
-----------  ----------  ------------
500010.E-03  2.0000E+02  0.0000E+00
100001.E-02  0.0000E+00  0.0000E+00
150001.E-02  0.0000E+00  0.0000E+00
200001.E-02  0.0000E+00  0.0000E+00
250001.E-02  0.0000E+00  0.0000E+00
300001.E-02  0.0000E+00  0.0000E+00
350001.E-02  0.0000E+00  0.0000E+00
400001.E-02  0.0000E+00  0.0000E+00
450001.E-02  0.0000E+00  0.0000E+00
500001.E-02  0.0000E+00  0.0000E+00
550001.E-02  2.0000E+02  0.0000E+00
600001.E-02  0.0000E+00  0.0000E+00
650001.E-02  0.0000E+00  0.0000E+00
700001.E-02  0.0000E+00  0.0000E+00
750001.E-02  2.0000E+02  0.0000E+00
800001.E-02  0.0000E+00  0.0000E+00
850001.E-02  0.0000E+00  0.0000E+00
900001.E-02  2.0000E+02  0.0000E+00
950001.E-02  2.0000E+02  0.0000E+00
100000.E-01  2.0000E+02  0.0000E+00
105000.E-01  2.0000E+02  0.0000E+00
110000.E-01  4.0000E+02  0.0000E+00
115000.E-01  4.0000E+02  0.0000E+00
120000.E-01  6.0000E+02  0.0000E+00
125000.E-01  4.0000E+02  0.0000E+00
130000.E-01  8.0000E+02  0.0000E+00
135000.E-01  4.0000E+02  0.0000E+00
140000.E-01  4.0000E+02  0.0000E+00
145000.E-01  4.0000E+02  0.0000E+00
150000.E-01  2.0000E+02  0.0000E+00
155000.E-01  1.4000E+03  0.0000E+00
160000.E-01  4.0000E+02  0.0000E+00
165000.E-01  2.0000E+02  0.0000E+00
170000.E-01  8.0000E+02  0.0000E+00
175000.E-01  1.0000E+03  0.0000E+00
180000.E-01  6.0000E+02  0.0000E+00
185000.E-01  6.0000E+02  0.0000E+00
190000.E-01  4.0000E+02  0.0000E+00
195000.E-01  2.4000E+03  0.0000E+00
200000.E-01  1.2000E+03  0.0000E+00
205000.E-01  2.0000E+03  0.0000E+00
210000.E-01  1.4000E+03  0.0000E+00
215000.E-01  3.4000E+03  0.0000E+00
220000.E-01  2.0000E+03  0.0000E+00
225000.E-01  1.8000E+03  0.0000E+00
230000.E-01  4.4000E+03  0.0000E+00
235000.E-01  4.0000E+03  0.0000E+00
240000.E-01  5.2000E+03  0.0000E+00
245000.E-01  4.2000E+03  0.0000E+00
250000.E-01  5.8000E+03  0.0000E+00
255000.E-01  6.0000E+03  0.0000E+00
260000.E-01  6.4000E+03  0.0000E+00
265000.E-01  5.0000E+03  0.0000E+00
270000.E-01  6.2000E+03  0.0000E+00
275000.E-01  7.0000E+03  0.0000E+00
280000.E-01  1.0600E+04  0.0000E+00
285000.E-01  5.4000E+03  0.0000E+00
290000.E-01  8.2000E+03  0.0000E+00
295000.E-01  9.4000E+03  0.0000E+00
300000.E-01  8.2000E+03  0.0000E+00
305000.E-01  9.8000E+03  0.0000E+00
310000.E-01  9.2000E+03  0.0000E+00
315000.E-01  8.8000E+03  0.0000E+00
320000.E-01  9.0000E+03  0.0000E+00
325000.E-01  6.2000E+03  0.0000E+00
330000.E-01  7.2000E+03  0.0000E+00
335000.E-01  7.2000E+03  0.0000E+00
340000.E-01  4.2000E+03  0.0000E+00
345000.E-01  3.4000E+03  0.0000E+00
350000.E-01  2.4000E+03  0.0000E+00
355000.E-01  4.4000E+03  0.0000E+00
360000.E-01  2.4000E+03  0.0000E+00
365000.E-01  2.0000E+03  0.0000E+00
370000.E-01  1.2000E+03  0.0000E+00
375000.E-01  6.0000E+02  0.0000E+00
380000.E-01  2.0000E+02  0.0000E+00
385000.E-01  4.0000E+02  0.0000E+00
390000.E-01  4.0000E+02  0.0000E+00
395000.E-01  0.0000E+00  0.0000E+00
400000.E-01  0.0000E+00  0.0000E+00
405000.E-01  0.0000E+00  0.0000E+00
410000.E-01  0.0000E+00  0.0000E+00
415000.E-01  0.0000E+00  0.0000E+00
420000.E-01  0.0000E+00  0.0000E+00
425000.E-01  0.0000E+00  0.0000E+00
430000.E-01  0.0000E+00  0.0000E+00
435000.E-01  0.0000E+00  0.0000E+00
440000.E-01  0.0000E+00  0.0000E+00
445000.E-01  0.0000E+00  0.0000E+00
450000.E-01  0.0000E+00  0.0000E+00
455000.E-01  0.0000E+00  0.0000E+00
460000.E-01  0.0000E+00  0.0000E+00
465000.E-01  0.0000E+00  0.0000E+00
470000.E-01  0.0000E+00  0.0000E+00
475000.E-01  0.0000E+00  0.0000E+00
480000.E-01  0.0000E+00  0.0000E+00
485000.E-01  0.0000E+00  0.0000E+00
490000.E-01  0.0000E+00  0.0000E+00
495000.E-01  0.0000E+00  0.0000E+00
500000.E-01  0.0000E+00  0.0000E+00
